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Technical Data Sheet
Eastman EastaPure™ Ethyl Acetate

  • LCD displays
  • Photoresist solvents
  • Photoresist strippers
  • Process solvents
Key Attributes
  • Excellent resin solubility
  • High Purity/Low Trace Metals
  • High assay
  • Inert - Food use with limitations
  • Inert - Nonfood use
  • Viscosity reducer

Product Description

Eastman EastaPure™ Ethyl Acetate solvent is a viscosity reducer for resins used in photoresist formulations. Ethyl Acetate can also be used as a primary photoresist solvent and is compatible with many resist polymers. High-purity (low-trace metals) solvents are required to make acceptable semiconductor chips, and special handling and storage procedures are used to maintain high purity.

The chemical substances for this product are listed as Inert Ingredients Permitted for Use in Nonfood Use Pesticide Products, and in Food Use Pesticide Products with limitations, under the Federal Insecticide, Fungicide, and Rodenticide Act (FIFRA). For details on specific permissions, click here.

Typical Properties

PropertyTypical Value, Units
     as Acetic Acid0.005 wt % max.
Autoignition Temperature485 °C (905 °F)
     BP70.4 °C (158.7 °F)
     Wt % Water8.5 wt %
Boiling Point 
     @ 760 mm Hg75.5-78 °C (168-173 °F)
Blush Resistance 
     @ 80°F (26.7°C)39 % RH
     Pt-Co10 max.
Critical Pressure 38.3 ATM
Critical Temperature250.1 °C
Critical Volume286 ml/g·mol
Dilution Ratio 
     VMP Naphtha1.1
Electrical Resistance20 Megohms
Empirical FormulaC4H8O2
Ethyl Alcohol0.2 wt % max.
Evaporation Rate 
     (ether = 1)3
     (n-butyl acetate = 1)4.1
Expansion Coefficient, per °C 
     @ 20°C0.00134
Flash Point 
     Tag Closed Cup-4 °C (24 °F)
Freezing Point-84 °C (-118 °F)
Hansen Solubility Parameters 
     Hydrogen Bonding3.5
Heat of Combustion-492.6 kcal/g·mol
Heat of Vaporization7703 cal/g·mol
Liquid Heat Capacity 
     @ 25°C40.82 cal/(g*mol)(°C)
Liquid Viscosity 
     @ 25°C0.5 cP (mPa·s)
Maximum Incremental Reactivity (MIR)0.64
Molecular Weight88.11
Nitrocellulose SolubilityActive
Refractive Index 
     @ 20°C1.37
     in Water, @ 20°C8 wt %
     Water in, @ 20°C3 wt %
Specific Gravity 
     @ 20°C/20°C0.901
Surface Tension 
     @ 20°C23.9 dynes/cm
TLV PPM 1998400
Upper Limits for Trace Metals 
     Calcium50 ppb
     Iron50 ppb
     Lithium50 ppb
     Magnesium50 ppb
     Potassium50 ppb
     Sodium50 ppb
     Zinc50 ppb
Vapor Density 
     (air = 1)3
Vapor Pressure 
     @ 20°C86 mm Hg
     @ 55°C45.9 kPa
Water0.05 wt % max.
     @ 20°C0.9 kg/L (7.51 lb/gal)

Properties reported here are typical of average lots. Eastman makes no representation that the material in any particular shipment will conform exactly to the values given.

Eastman and its marketing affiliates shall not be responsible for the use of this information, or of any product, method, or apparatus mentioned, and you must make your own determination of its suitability and completeness for your own use, for the protection of the environment, and for the health and safety of your employees and purchasers of your products. No warranty is made of the merchantability of fitness of any product, and nothing herein waives any of the Seller's conditions of sale.

4/3/2018 10:51:49 AM